Aspects of this topic are discussed in the following places at Britannica.
In IBM a stream of charged atoms (ions) of an inert gas, such as argon, is accelerated in a vacuum by high energies and directed toward a solid workpiece. The beam removes atoms from the workpiece by transferring energy and momentum to atoms on the surface of the object. When an atom strikes a cluster of atoms on the workpiece, it dislodges between 0.1 and 10 atoms from the workpiece material....
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